| 摘要 |
A photoprocessing method according to the present invention is directed to processing an object (20) using a laser beam by processing the laser beam so as to correspond to the shape of a light-transmitting portion (12a) formed in a mask member (12), introducing the laser beam thus processed into the mask member, irradiating the laser beam which has passed through the light-transmitting portion formed in the mask member onto the object to be processed, projecting the laser beam which has passed through the mask member onto the object to be processed by a projection optical system (13), and processing the object to be processed by the laser beam thus projected, leaving a portion, on which the laser beam is projected, corresponding to a light-shielding portion of the mask member. |
