发明名称 Pressure sensitive adhesive sheet for dicing objects
摘要 <p>A process for dicing an object 6 comprises setting the object on a pressure sensitive adhesive sheet 10, the adhesive sheet comprising at least one layer of shrinkable film 2, an expansible film 4 and a pressure sensitive adhesive layer 1 for mounting the object; fixing the edges of the pressure sensitive adhesive sheet to a ring frame 5; dicing the object into chips; and shrinking the shrinkable film to thereby expand the chip spacings. The shrinkable and expensible films consist of a plastics material and the pressure sensitive adhesive may be base on a rubber, acrylic, silicone or polyvinyl ether. The object 6 may be a semi conductor wafer, a ceramic plate, a lead frame, a printed circuit board or a TAB tape.</p>
申请公布号 GB2322006(A) 申请公布日期 1998.08.12
申请号 GB19980002834 申请日期 1998.02.10
申请人 * LINTEC CORPORATION 发明人 HAYATO * NOGUCHI;KAZUYOSHI * EBE
分类号 H01L21/68;H01L21/78;(IPC1-7):H01L21/78 主分类号 H01L21/68
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