| 摘要 |
PROBLEM TO BE SOLVED: To output a high frequency of comparatively large electric power applicable to an induction plasam generator by operating capacitance devices together with a coil, and driving high frequency oscillation by a transistor which imparts a DC main power source between a drain and a source and imparts positive feedback to a gate. SOLUTION: A high frequency oscillator circuit 12 is composed of a transistor T1 to drive oscillation and a series circuit 50 containing capacitance devices C1 and C2 to operate together with a load coil L1 to maintain the oscillation. Plasma 18 operates a coupling inductance and a resistance, and a power source 30 to convert AC into DC imparts DC main voltage between a source 52 and a drain 54 of the transistor T1. The transistor T1 imparts positive feedback to a gate 56, and inductively transmit electric power to plasma forming gas to generate the plasma 18 in a channeling device 16 through the load coil L1. |
