| 摘要 |
PROBLEM TO BE SOLVED: To prevent deposition of foreign matters on a liner by laminating a spare liner to the liner with an adhesive material interposed. SOLUTION: A pellicle film 1 is stretched and adhered to one end face of a pellicle frame 2, while a liner 4 is adhered with an adhesive 3 applied on the other end face. Moreover, a release agent 5 and an adhesive 6 are applied on the liner 4 and then a spare liner 7 is adhered. Therefore, since the spare liner 7 is adhered to protect the liner 4, deposition of foreign matters such as dust is prevented. Even when foreign matters deposit on the liner 4, the foreign matters can be removed with the adhesive when the spare liner 7 is peeled off, which prevents deposition of foreign matters on the liner 4 and intrusion of foreign matters by the liner 4 when the pellicle is adhered to a mask. By forming the liner 4 and the spare liner 7 from a material which hardly causes electrostatic charges, deposition of foreign matters due to electrostatic charges can be prevented when the liners are peeled. |
