SUBSTRATE TREATING DEVICE,申请号JP19970015707-传众专利搜索

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发明名称	SUBSTRATE TREATING DEVICE
摘要
申请公布号	JPH10214769(A)	申请公布日期	1998.08.11
申请号	JP19970015707	申请日期	1997.01.29
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	OTANI MASAMI;MATSUNAGA SANENOBU;KAMIYAMA TSUTOMU;KITAKADO RYUJI;AOKI KAORU
分类号	H01L21/027;H01L21/324;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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