Mass spectrometer, skimmer cone assembly, skimmer cone and its manufacturing method

摘要

Disclosed is a structure comprising; (a) Plasma gas is supplied to torch tube 8 from inert pressure vessel 1. (b) Nebulizer 3 absorbs sample 4 to vaporize the sample as aerosol and to introduce it into plasma 5. (c) Plasma 5 touches sampling cone 10 having an opening at the apex and a conical surface, whereby an ion stream is extracted through the opening of the sampling cone whose pressure is reduced at the rear face thereof. (d) The extracted ion stream further touches skimmer cone 12 of the conical surface having a small hole at the apex, and is absorbed into vacuum chamber 13 where the pressure is further reduced at the rear face. (e) The ion stream is flowed into quadruple pole filter 18 to carry out the mass spectrometry analysis of the ion stream.