| 摘要 |
PROBLEM TO BE SOLVED: To reduce the pressure in a sealed chamber sufficiently and to improve the detecting sensitivity of a detecting part by removing oxygen in the sealed chamber, wherein the detecting part for detecting external force is contained. SOLUTION: An oxygen absorbing metal film 32 comprising zirconium is evaporated and provided at the bottom part of a concave part 5B of a glass substrate 5. The oxygen gas generated at the anode bonding time of a silicon substrate 2 and the glass substrate 5 is absorbed by the oxygen absorbing metal film 32. Furthermore, the oxygen absorbing metal film 31 can be self-heated by applying a current from the outside. Even if the oxidation of the surface of the metal film after the sealing is in a limit state, the oxygen gas can be absorbed more in a sealed chamber 6 by the self-heating and reactivation. The pressure in the sealed chamber 6 can be sufficiently reduced, and the detecting sensitivity of an angular velocity can be improved. |
