| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement control actuator whose constitution is simple, whose displacement amount is large, in which irregularities in a characteristic such as the displacement amount or the like are extremely small, and by which the displacement amount can be controlled with high accuracy. SOLUTION: In piezoelectric substrates 2a, 2b whose main faces are faced, whose thickness is 50μm, whose width is 1mm and whose length is 8mm and which are composed of rectangular lithium niobate (LiNbO3 ), their main faces are bonded directly in such a way that their polarization axes are directed in mutually opposite directions. Thereby, a piezoelectric element 2 is constituted. Electrodes 3a, 3b whose thickness is 0.2μm and which are composed of chromium-nickel are formed respectively on the two opposite main faces of the piezoelectric element 2, and a precision displacement control actuator which is composed of a bimorph-type mechanical-electric conversion element 1 is constituted. |
