Method for manufacturing a head suspension with a microactuator

摘要

A method for manufacturing a disk drive suspension including a load beam and a microactuator. The load beam and microactuator are formed from three sheets of laminated material. A first sheet of material is chemically etched to form the load beam and lower electromagnetic field generating coil members of the microactuator. A second sheet of material is chemically etched to form stationary and moving pole members of the microactuator, and a third sheet of material is chemically etched to form upper magnetic field generating coil members. The sheets of material are bonded together to form first and second magnetic field generating coils surrounding the stationary pole member. A moving pole member is chemically etched from the second sheet of laminated material and has a free end mounted between the coils at the ends of the stationary pole member. The opposite end of the moving pole member is mounted to a distal end of the load beam. In response to tracking control signals, the moving pole member moves the distal end of the load beam along a tracking axis.