| 摘要 |
A method for making ceramic, micro-electromechanical tools which can be used for the production of micromagnets with a multi-pole, micro-polarization pattern. The method includes the steps of molding a plurality of base elements in the form of a generally planar array from a ceramic material, each of the plurality of base elements including a top surface and a bottom surface with a cavity in the top surface, forming a plurality of substantially parallel bores through each of the base elements in the generally planar array adjacent each of said cavities, forming a plurality of recesses in said top and bottom surfaces, the recesses being connected to the plurality of substantially parallel bores, the plurality of substantially parallel bores and the plurality of recesses combining to form a generally serpentine conduit path about the cavity, supporting the generally planar array on a micro-porous substrate within a chamber, flooding one side of the generally planar array with a molten electrically conductive material, drawing a vacuum within the chamber on an opposite side of the generally planar array and beneath the micro-porous substrate causing the molten electrically conductive material to flow into and through the plurality of substantially parallel bores and into the plurality of recesses, cooling the molten electrically conductive material to form a generally serpentine electrical conductor including a plurality of substantially parallel bus bars through each of the base elements, and cutting the generally planar array into a plurality of individual micro-electromechanical tools.
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