摘要 |
PROBLEM TO BE SOLVED: To provide a well polarized piezoelectric substrate. SOLUTION: In a polarization method, a plurality of grooves 4 are formed at equal intervals and in parallel on the surface and the rear of a sheetlike piezoelectric ceramic, and first electrodes 2a, 2b, 2c and second electrodes 3a, 3b, 3c are then formed so as to cover the grooves 4. After that, the first electrodes 2a, 2b, 2c and the second electrodes 3a, 3b, 3c are set to a short- circuit state, a potential difference is given across the adjacent electrodes on the same face, and the sheetlike piezoelectric ceramic is polarized. |