发明名称 CAMERA DEVICE FOR DETECTING ELECTROMAGNETIC WAVE
摘要 <p>PROBLEM TO BE SOLVED: To provide a camera device for detecting electromagnetic wave wherein, even with a limit on pulse width of a control signal for opening/closing a shutter, observation with a detection period narrower than the pulse width is possible. SOLUTION: A camera 4 which detects such electromagnetic wave as specific wavelength occurring from a to-be-analyzed device, a control signal generating means 6 which, while driving the to-be-analyzed device repeatedly, generates such control signal as makes the camera into a detection state at a specific timing during driving, a signal processing means 8 which, based on the control signal of the control signal generating means, processes camera's detection signal, and a monitor means 10 which monitors the signal processed with the signal processing means are provided. The control signal generating means 6 decides such detection timing as, at previous driving and current driving for the to-be-analyzed device, either of camera's detection start timing or detection finish timing agrees while the other not agrees, and the signal processing means 8 compares camera's previous detection value to current detection value, with its difference taken as the amount of electromagnetic wave at specific wavelength.</p>
申请公布号 JPH10213634(A) 申请公布日期 1998.08.11
申请号 JP19970015293 申请日期 1997.01.29
申请人 TOSHIBA CORP 发明人 SHITO MASATO
分类号 G01R31/26;G01N21/00;G01N21/88;G01N21/956;G01R31/302;H01L21/66;(IPC1-7):G01R31/302 主分类号 G01R31/26
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