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发明名称
ETCHING METHOD FOR OXIDE SUPERCONDUCTIVE THIN FILM
摘要
申请公布号
JPH10215007(A)
申请公布日期
1998.08.11
申请号
JP19970015105
申请日期
1997.01.29
申请人
NEC CORP
发明人
HATTORI WATARU
分类号
H01L39/24;H01B13/00;(IPC1-7):H01L39/24
主分类号
H01L39/24
代理机构
代理人
主权项
地址
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