| 摘要 |
PROBLEM TO BE SOLVED: To perform stable substrate observation even if the vibration of a substrate is not sufficiently controlled by always displaying a substrate image having a high focusing degree at the time of outputting a timing signal in the manufacturing prosess for a large substrate such as a liquid crystal display. SOLUTION: When the focusing mechanism of an optical microscope 1 is fixed in a reference focus position for the observed surface of a sample, the wave form 35 of a focusing signal is displayed based on a positional relationship between an objective lens and a vibrated glass board. An image fetching trigger signal 36 is produced matching a focusing time appearing in the focusing signal 35 fetched by a timing generator, an image from a photographing device 3 is fetched in an image storage device 4 by the timing of the trigger signal 36 and this stored image is displayed and thus a still image having a high focusing degree is obtained to be used for observation of the substrate. Thus, even for observation of high magnification where the vibration of the glass board is not suppressed, since the image at the time of focusing is displayed as a still image, stable substrate observation is performed. |
