Device and method to detect dislocation of object image data

摘要

This invention provides a device and method to detect a degree of misregistration and angle of misrotation of an object image, a device to measure an object using such a degree of misregistration and an angle of misrotation and a device to record data representing a model. A model of the object used is imaged and at least two regions are established in the image data of the model. Delimiting values which are extracted from geometric features of these regions are stored as reference values. The same regions are then extracted from an image of the object, and similar delimiting values are obtained from their geometric features. The conditions so obtained are compared with the stored standard reference values. The degree of misregistration of the object to be processed with respect to the object used as the standard of comparison is calculated from the difference between these two values.