| 摘要 |
PROBLEM TO BE SOLVED: To obtain a substrate material having electric conductivity and low resistance to mechanical working, less liable to chip and excellent in discharge breakdown resistance by using a matrix phase of carbide of one or more among Ti, W and Ta and a dispersed phase of one or more among Al2 O3 , Cr2 O3 and ZrO2 and specifying the volume ratio of the matrix phase. SOLUTION: This substrate material consists of 60-95vol.% matrix phase of carbide of one or more among Ti, W and Ta and a dispersed phase of one or more among Al2 O3 , Cr2 O3 and ZrO2 in the form of dispersed particles preferably having <=2.0μm average particle diameter. The carbide is preferably represented by the formula, (Tij Wm Tan )Cx (where j+m+n=1, 0<=j<=1, 0<=m<=0.5, 0<=n<=1 and 0.5<=x<=1). Oxygen and/or nitrogen may be allowed to enter into solid soln. in the matrix phase forming carbide represented by the formula MeC (where Me is one or more among Ti, W and Ta) by such amts. as to satisfy 0.5<=p+q+r<=1, 0.5<=0<=1, 0<=q<=0.4 and 0<=r<=0.2 in the resultant compd. represented by the formula, MeCp Oq Nr . |
