| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical-beam-spot measuring device, which can perform the measurements of the diameters, positions and the like a plurality of the spots of a plurality of optical beams without cost increase. SOLUTION: A CCD line sensor 3 has the field of view, wherein all the spot images in the secondary scanning direction (Z direction) are displayed. A control part 4 moves an expanding optical system 2 and a CCD line sensor 3 in the main scanning direction (X direction) with an X-axis stage, and accepts the signal of the quantity of light with the CCD line sensor 3 through an expanding optical system 2. The control part 4 measures the diameters, positions and the like a plurality of the optical beams based on the signals of the quantity of light. |
