| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the need for periodical pressure-adjusting work in a reaction tube and a load-lock chamber in pressure adjustment by automating adjustment of a gas flow rate. SOLUTION: Pressure sensors 6 and 7 are provided for detecting pressures in a reaction tube 1 and a load-lock chamber 2, respectively. The pressures detected by the both sensors 6 and 7 are compared at a comparator 8, which in turn issues a valve adjustment signal according to its comparison result to control an opening degree of a valve 10. The comparator 8 is connected to a motor 9 to rotate the motor according to a control signal. Rotation of the motor 9 causes the valve travel of the needle valve 10 to be controlled, whereby a discharge amount of a discharge tube 4 of the reaction tube 1 is adjusted so that inputs to the comparator 8 coincide with each other. Thereby pressures in the reaction tube 1 and load-lock chamber 2 can be made equal to each other. |
