ACCELERATION SENSOR AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a compact acceleration sensor which shows high sensitivity in a wide range of frequencies and considerably small variation in characteristics such as sensitivity, etc. SOLUTION: The acceleration sensor is provided with a thin bimorph piezoelectric element 1 and a thick supporting body 3 directly bonded to at least one of a front and a rear main faces of the piezoelectric element 1. The piezoelectric element 1 is obtained by polarizing and reversing at least two piezoelectric bodies 2a, 2b and directly bonding the piezoelectric bodies. A confronting electrode is formed at least at a main face of the sensor where the supporting body 3 is bonded, to electrically connect the main face of the piezoelectric element 1 and a main face or side face of the supporting body 3. Signals are taken outside from a face of the electrode on the supporting body 3.