| 摘要 |
PROBLEM TO BE SOLVED: To realize cost and size reductions and stability of measuring of an angular velocity by constituting a vibration gyro sensor by a vibrator of the structure that three bar shaped vibrators parallel to each other are coupled at both ends. SOLUTION: Vibrators of the vibration gyro sensor 21 are obtained by quarrying a crystal row stone to plate states so that length, width and thickness becomes Y-, Z- and X-axis with respect to a crystal axis, processing rectangular holes 2, 3 by photolithography, and forming a left vibrating part 4, a central vibrating part 5 and right vibrating part 6 connected at both ends and parallel to each other. Electrodes of two types of four surface electrodes and front and back electrodes are formed on the parts 4, 5, 6 by depositing or photography, and any one is used as a driving electrode and the other is used as a detecting electrode. The parts 4, 6 are excited in the same direction and the part 5 is excited in an opposite direction by using the driving electrode, and vibration generated by a Coriolis force as the sensor 21 rotates in the Y-axis direction is detected as a voltage proportional to the angular velocity of the vibration by the detecting electrode. |
