| 摘要 |
PROBLEM TO BE SOLVED: To realize improvement of stability for symmetrical disposition and impact of a piezoelectric element by providing a pair of support members mounted at a vibration node point of a vibrator at a central bending point bent at a predetermined angle on an upper surface of the vibrator. SOLUTION: The angular velocity sensor 1 comprises a vibrator 2 formed in a columnar body, an exciting driving piezoelectric element 3 mounted on a side of the vibrator 2, rotation detecting piezoelectric elements 4A, 4B, and a pair of support members 5A, 5B mounted at a vibration node point of the vibrator 2. For example, the members 5A, 5B formed substantially in an M shape of wire materials such as nickel-plated tungsten wires are embedded at both ends 8, 9 in a mounting base, and welded at a central bending point 10 to the upper surface of the vibrator 2 by spot welding. Since the members 5A, 5B are formed in the M shape, symmetry of the elements 4A, 4B is maintained. Since both the ends 8, 9 are embedded, the sensor 1 has good durability against unexpected impact. |
