| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of holding substrates in safety and a handy way without contaminating surfaces of substrates at all in a container which can be confirmed that the state is accurately pure. SOLUTION: In a structure that a substrate holding container 1 is airtightly closed by a lid 11, a glass substrate 2 is accommodated in a carrier 3 and held inside. Quality of the substrate holding container 1 is a stainless steel material (JIS standard SUS 304). After the carrier 3 is projected and molded with an aluminum alloy (JIS standard A 5052), it is precisely processed and fully plated on the surface. Incidentally, the carrier 3 forms a U-shaped groove inside walls of both sides, and the substrate 2 is put into the groove and is supported by a stopper 4 in the structure. Here, the inner face of the substrate holding container 1 and the surface of the carrier 3 have a contact angle of 20 degrees or less for pure water.</p> |
