| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing optical waveguide element which has improved accuracy of mirror plane and has good reproducibility and mass-productivity. SOLUTION: The element is provided, by placing optical waveguide core material 3 on a substrate 2, forming optical waveguide 3A, a gap 3B in which a mirror 5A is placed, and a supporting region 3C for supporting the mirror 5A, filling the gap 3B flat with a sacrifice layer 4, pacing a mirror layer 5 on the surface 4a of the sacrifice layer 4, forming a supporting layer 6 on the surface of the supporting region 3C, connecting a part of the mirror layer 5 to the supporting layer 6 with a flexible thin film 7, removing the sacrifice layer 4, and inclining the mirror layer 5 in the empty gap 3B, where the inclined mirror layer is called mirror 5A. By placing the mirror layer 5 on the surface 4a of the flat sacrifice layer 4, a reflection plane 5a which has high plane accuracy is provided. Because removing the sacrifice layer 4 causes the mirror layer 5 to incline, reproducibility and mass-productivity are improved. |
