发明名称 CARRYING EQUIPMENT FOR CLEANING
摘要 PROBLEM TO BE SOLVED: To prevent cleaning liquid sticking on a board from running on a carrying roller, and flowing outside a cabinet, by installing liquid shield members on both end portions positioned in a carrying roller cabinet. SOLUTION: A pair of retaining parts 17 for retaining a board 10 are laterally symmetrically arranged on a carrying roller 7 from the axial direction center. Disk type shielding members 18 are engaged from outside and fixed to portions positioned on both ends of a cabinet 1. By the shield member 18, cleaning liquid sticking on the carrying roller 7 is prevented from flowing in the axial direction of the roller 7, so that the cleaning liquid can be prevented from running on the carrying roller 7, flowing out from aperture parts 6 of side walls 1a, 1b of the cabinets 1 and dropping.
申请公布号 JPH10209096(A) 申请公布日期 1998.08.07
申请号 JP19970012560 申请日期 1997.01.27
申请人 SHIBAURA ENG WORKS CO LTD 发明人 GOKAN HIROYUKI
分类号 H01L21/677;H01L21/304;H01L21/68;(IPC1-7):H01L21/304 主分类号 H01L21/677
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