| 摘要 |
PROBLEM TO BE SOLVED: To allow sure detection of graphic data lowering accuracy in mask manufacture, by inputting graphic data as verification object so as to extract split lines for detecting a split line for splitting a specific value CD of the extracted split lines. SOLUTION: Graphical data of a semiconductor integrated circuit are inputted from the data input part 1 to a split line extraction unit 2 as verification objects so as to extract trapezoidally split lines by the split line of the extraction unit 2. Then, those of the graphic data whose width splitted by the split line are not exceeding a microvalue, nor sandwiched by other graphics, are detected by the microwidth graphic detection unit 3. On the other hand, the CD width graphic detection unit 4 retrieves a part whose width before a trapezoidal split has a specific value CD, and detects whether or not the part is partitioned in order to detect a partitioned trapezoid. Then, a detected microwidth graphic and a CD-width graphic are outputted from a data output unit 5. |
