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发明名称
SMALL PEDESTAL MEMBER AND ITS MANUFACTURE
摘要
申请公布号
JPH10209319(A)
申请公布日期
1998.08.07
申请号
JP19970005821
申请日期
1997.01.16
申请人
SUMITOMO KINZOKU ELECTRO DEVICE:KK
发明人
OBA AKIRA
分类号
H01L23/12;H01L21/60;(IPC1-7):H01L23/12
主分类号
H01L23/12
代理机构
代理人
主权项
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