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发明名称
CHARGED PARTICLE BEAM UNIT
摘要
申请公布号
JPH10208679(A)
申请公布日期
1998.08.07
申请号
JP19970012399
申请日期
1997.01.27
申请人
HITACHI LTD
发明人
SAKAI KATSUHIKO
分类号
H01J37/20;H01J37/02;H01J37/147;(IPC1-7):H01J37/147
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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