发明名称 Optical module & method for manufacturing the same
摘要 An optical module and method in which an optical element (32) and an optical waveguide (34) are formed on a silicon substrate (31) so that an optical axis of the optical element coincides with an optical axis of the optical waveguide. Metallized films (41, 42) are formed on the silicon substrate and on the optical waveguide respectively, and these metallized films are bonded to each other by mutual diffusion of their atoms.
申请公布号 US5793914(A) 申请公布日期 1998.08.11
申请号 US19960699786 申请日期 1996.08.20
申请人 NEC CORPORATION 发明人 SASAKI, JUNICHI
分类号 G02B6/42;H01L31/0232;H01L33/12;H01L33/62;(IPC1-7):G02B6/30 主分类号 G02B6/42
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