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发明名称
摘要
申请公布号
FR2010912(A1)
申请公布日期
1970.02.20
申请号
FR19690019734
申请日期
1969.06.13
申请人
TERADYNE INC
发明人
分类号
G01R31/28;G01R31/316;G01R31/319;G06F11/22;H01L21/66;H01L21/822;H01L27/04;H03K5/15;(IPC1-7):G01R31/00
主分类号
G01R31/28
代理机构
代理人
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地址
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