| 摘要 |
PROBLEM TO BE SOLVED: To reduce the occupied area of an alignment mark-forming region. SOLUTION: A contact alignment mark 18A is provided on a layer insulation film 17, and a wiring alignment mark 19A is formed slightly larger above a gate alignment mark 15A while a shield film 19S shields all other lower alignment marks. Thus, the opaque film-made alignment marks and shield film shield all the lower alignment marks, thereby laminating one above another. |
