发明名称 PROCESSING CONTROLLER
摘要 <p>PROBLEM TO BE SOLVED: To effectively prevent the overlap of processing to plural targets to be processed without executing complicated operation. SOLUTION: A schedule preparing means 3 prepares a schedule for ending the processing of each target to be processed based on information specifying a processing module to be carried in each target which is stored in a route information storing means 1, the information of time proposed to be required for prescribed processing which is stored in a processing schedule time storing means 2 and the information of time proposed to be required for the carrying processing of each target. Then an adjusting means 4 adjusts a schedule between respective targets to be processed by evading the processing of the same processing module between different targets and the overlap of carrying processing on the same route while continuing the schedules of respective targets. Then a processing control means 5 allows a processor to execute the processing of plural targets based on the adjusted schedule.</p>
申请公布号 JPH10207525(A) 申请公布日期 1998.08.07
申请号 JP19970022107 申请日期 1997.01.21
申请人 KOKUSAI ELECTRIC CO LTD 发明人 YAMAMORI KATSUSHI;KIYOKU MASATOSHI;OKUNO MASANORI
分类号 B23Q41/08;G05B15/02;G05B19/418;H01L21/02;(IPC1-7):G05B19/418 主分类号 B23Q41/08
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