| 摘要 |
PROBLEM TO BE SOLVED: To substantially prevent the peeling electrification at the time of peeling a liner and to prevent the adhesion of dust, etc., to a pellicle by constituting at least either of an adhering means disposed at the end face of a pellicle frame and the liner of a static-dissipative material. SOLUTION: The pellicle 1 is formed by spreading a pellicle frame 2 in one aperture of the pellicle frame 3. The pellicle 1 has the adhering means 5 and the liner 4, at least one of which consists of the static-dissipative material. The pellicle of which at least either of the adhering means or the line consists of the static-dissipative material is capable of sufficiently decreasing the quantity of the electrification generated at the time of peeling the liner 4 from pellicle 1 and preventing the adhesion of foreign matter on the pellicle 1. The effect is higher if both are formed of the static-dissipative materials. The static- dissipative material may be a material formed by coating its surface with a coating material having a static-dissipative property. The static-dissipative material having surface resistivity of preferably <=10<14> Ω, more particularly preferably <=5×10<13> Ω is adequate. |
