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发明名称
CAPACITIVE ACCELERATION SENSOR AND ITS MANUFACTURE
摘要
申请公布号
JPH10206457(A)
申请公布日期
1998.08.07
申请号
JP19970009633
申请日期
1997.01.22
申请人
HITACHI LTD;HITACHI CAR ENG CO LTD
发明人
HANZAWA KEIJI;SHIMADA SATOSHI;SUZUKI KIYOMITSU;MATSUMOTO MASAHIRO;SAITO AKIHIKO;ICHIKAWA NORIO;HORIE JUNICHI;NAKAZAWA TERUMI
分类号
G01P15/125;H01L29/84;(IPC1-7):G01P15/125
主分类号
G01P15/125
代理机构
代理人
主权项
地址
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