| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance intensity of an electron beam reflected by a sample when a sample holding part is adjusted since intensity of the electron beam reflected by the sample is weak. SOLUTION: A switch part 4 connects/separates the earth to/from a sample holding part 3 to hold a sample. In a condition where the sample holding part 3 is separated from the earth, an electron is irradiated to a sample 10, and the sample is electrified, and the irradiate electron is reflected by electric repulsion of an electrified sample surface, and intensity of an electron beam from the sample is enhanced. The switch part 4 removes electrification of the sample by connecting the electrified sample holding part 3 to the earth after the electron beam is detected.</p> |
