| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope which reduces the load of a part to be scanned, which increases a scanning speed and which can be combined with an optical microscope and to provide its optical-displacement detecting device. SOLUTION: A microscope is provided with a cantilever comprising a probe faced with a sample surface 11, optical-displacement detecting means 14, 17 which detect the flexure deformation amount of the cantilever, a scanning means by which the cantilever is scanned with reference to the sample surface, a drive means which changes the distance between a sample and the probe and a control means which controls the drive means in such a way that the output signal of the optical- displacement detecting means agrees with a set value. Then, the optical-displacement detecting means is provided with a laser light source 13 by which a laser beam 14 is shone at the cantilever, a photodetector 17 which receives a reflected laser beam 14a from the cantilever so as to detect the displacement amount and optical means 15, 16 by which the reflected laser beam is focused on the center of the photodetector. The optical-displacement detecting means is attached so as to be fixed, and the scanning means scans and moves the cantilever only.
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