SELECTIVE ETCHING METHOD FOR STACK ORGANIC FILM,申请号JP19970349594-传众专利搜索

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发明名称	SELECTIVE ETCHING METHOD FOR STACK ORGANIC FILM
摘要
申请公布号	JPH10209135(A)	申请公布日期	1998.08.07
申请号	JP19970349594	申请日期	1997.12.18
申请人	LG SEMICON CO LTD	发明人	JAE-HEE HA
分类号	H01L21/302;H01L21/027;H01L21/3065;H01L21/311;H01L21/3213;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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