PROBE APPARATUS AND TEST METHOD BY PROBE APPARATUS,申请号JP19970019857-传众专利搜索

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发明名称	PROBE APPARATUS AND TEST METHOD BY PROBE APPARATUS
摘要
申请公布号	JPH10209231(A)	申请公布日期	1998.08.07
申请号	JP19970019857	申请日期	1997.01.17
申请人	NIPPON STEEL CORP	发明人	TOGAMI TERUTOSHI
分类号	G01R31/28;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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