发明名称 Installation for providing working gas, e.g. for manufacture of electronic circuits
摘要 The installation (11) consists of a distribution unit (13) for the working gas with a heater (16) comprising at least one Ranque tube (33, 35, 37, 39, 41) with inlets connected to a source of a feed gas (31) under pressure and outlets (33a, 35a, 37a, 39a, 41a) for hot gas and outlets (33b, 35b, 37b, 39b, 41b) for cold gas, with the heater adapted to use the hot gas as a source of heat. The heater (16) is additionally equipped with guides (49, 53, 57, 65, 76) to direct the hot gas to deflectors (31, 55, 59) and apply the hot gas jets to certain sections of the distributor. The installation also has a storage tank for liquefied working gas, and the deflectors are designed to direct at least one jet of hot gas to the lower part of the storage reservoir.
申请公布号 FR2759146(A1) 申请公布日期 1998.08.07
申请号 FR19970001302 申请日期 1997.02.05
申请人 L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 发明人 THONNELIER JEAN YVES
分类号 F17C7/04;F25B9/04 主分类号 F17C7/04
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