Membranstruktur aus Keramik und Verfahren zu ihrer Herstellung

摘要

A ceramic diaphragm structure (2) includes a ceramic substrate (4) having at least one window portion (6), and a thin ceramic diaphragm plate (8) laminated so as to cover the window portion, wherein the ceramic diaphragm structure is unitarily formed so that the thin ceramic diaphragm portion (10) protrudes in the direction opposite to the window portion (6), and the ceramic connecting layer (1) connects the thin ceramic diaphragm plate to the ceramic substrate. The ceramic diaphragm structure has a high resonance frequency, an enhanced strength, an excellent quality and a high reliability.