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发明名称
Halbleiterbauelement und Verfahren zu dessen Herstellung
摘要
申请公布号
DE69032446(D1)
申请公布日期
1998.08.06
申请号
DE19906032446
申请日期
1990.03.28
申请人
SEIKO EPSON CORP., TOKIO/TOKYO, JP
发明人
TAKEUCHI, MASAHIRO C/O SEIKO EPSON COPORATION, SUWA-SHI NAGANO-KEN, JP
分类号
H01L21/28;H01L21/336;H01L29/78;(IPC1-7):H01L21/336
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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