| 摘要 |
<p>PROBLEM TO BE SOLVED: To detect the fine defective place of a specimen, by deflectably scanning a primary electron beam, from an electric field radiating cathode, on a specimen surface retained on a specimen mount, in the inside of an exhaust system including an ion pump; to decelerate by a decelerating power source. SOLUTION: An electric field radiation cathode 11, having a monocrystal sharp needle 11a in an axis direction 100, radiates a primary electron beam to the restriction hole 12a of an anode 12, by using various external power sources in the inside of an exhaust system 17 including an ion pump. An electron beam bundle, passed through the hole 12a, is converged by a magnetic convergent lens 13, to be deflected by a deflecting coil 15, to be decelerated to a necessary speed by a power source 26, thereby irradiating on a specimen mount 43. An electron, passed through an auxiliary electrode 9, out of secondary electrons generated at that time, is detected by a secondary electron detector 22, to display the defective information of an insulating coat 2, amplified by an amplifyer 28 by a display 29. This can detect the fine defective place of a specimen 32 of 0.1μm degree in accordance with the fine spot diameter of the electron beam.</p> |
