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发明名称
摘要
申请公布号
JP2783479(B2)
申请公布日期
1998.08.06
申请号
JP19920023476
申请日期
1992.02.10
申请人
SHAAPU KK
发明人
OONISHI TETSUYA;WAKAMOTO FUSHINOBU;MASUI KATSUHIRO;MARUYAMA HIROMI
分类号
H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/56
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