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发明名称
摘要
申请公布号
JP2782572(B2)
申请公布日期
1998.08.06
申请号
JP19930082812
申请日期
1993.03.16
申请人
HOKURIKU DENKI KOGYO KK
发明人
NAKAMIZO YOSHUKI;TANAKA KYOYUKI;FUKUHISA KOJI
分类号
G01L9/04;G01L9/00;H01L29/84;(IPC1-7):G01L9/04
主分类号
G01L9/04
代理机构
代理人
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