Verfahren und Vorrichtung zum Richten eines Strahls auf unterschiedliche Positionen einer Fläche sowie Verwendung der Vorrichtung

摘要

A process is disclosed for directing a beam onto different positions of a surface. The direction of the beam is altered by a defined force that acts upon it so that the beam may be associated to a defined position on the surface. The process is characterised in that the beam propagating in the axial or z direction runs through a region in the z direction and in that a force acts upon the beam in defined zones in the z direction within said region, altering the direction of a defined part of the beam in the defined zone by a defined amount. Also disclosed are a device for directing a beam onto different positions of a surface, and the use of the device.