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发明名称
웨이퍼 이송장치
摘要
<p>본 고안은 웨이퍼를 흡착하여 수평방향으로 이동되면서 각각의 챔버 내로 웨이퍼를 인입/인출시키는 웨이퍼 이송장치에 관한 것으로, 본 고안은 장치에 웨이퍼를 이송하는 이송암의 이동범위가 제어되는 제어수단을 부가하여서, 이송암이 한계구동범위 밖으로 이탈되어 파손됨을 방지가능함을 특징으로 한다.</p>
申请公布号
KR19980026180(U)
申请公布日期
1998.08.05
申请号
KR19960039040U
申请日期
1996.11.08
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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