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经营范围
发明名称
Ultra clean nozzle
摘要
申请公布号
GB2294217(B)
申请公布日期
1998.08.05
申请号
GB19950015688
申请日期
1995.07.31
申请人
* SUMITOMO HEAVY INDUSTRIES LTD
发明人
TADAMOTO * TAMAI
分类号
B08B3/02;B05B1/00;B24C3/32;B24C5/04;B24C7/00;H01L21/02;H01L21/304;(IPC1-7):B05B1/00;B24C3/00;H01L21/00
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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