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发明名称
IMPROVED PLANAR MAGNETRON SPUTTERING MAGNET ASSEMBLY
摘要
申请公布号
EP0600070(B1)
申请公布日期
1998.08.05
申请号
EP19930914096
申请日期
1993.05.25
申请人
MANLEY, KELLY
发明人
MANLEY, BARRY W.
分类号
C23C14/35;H01J37/34;(IPC1-7):C23C14/35;C23C14/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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