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发明名称
Cleansing objects such as semiconductor wafers
摘要
申请公布号
GB2321782(A)
申请公布日期
1998.08.05
申请号
GB19980002137
申请日期
1998.01.30
申请人
* TOKYO SEIMITSU CO., LTD.
发明人
TAKAO * INABA;KENJI * SAKAI
分类号
B08B17/02;B08B3/08;B08B3/10;B08B3/12;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):H01L21/00
主分类号
B08B17/02
代理机构
代理人
主权项
地址
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