Pattern formation method and surface treating agent,申请号EP19960112569-传众专利搜索

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发明名称	Pattern formation method and surface treating agent
摘要
申请公布号	EP0757290(A3)	申请公布日期	1998.08.05
申请号	EP19960112569	申请日期	1996.08.02
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;SHIN-ETSU CHEMICAL CO., LTD.	发明人	NAKAOKA, SATOKO;ENDO, MASAYUKI;OHSAKI, HIROMI;KATSUYAMA, AKIKO
分类号	G03F7/075;(IPC1-7):G03F7/075	主分类号	G03F7/075
代理机构		代理人
主权项
地址

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