发明名称 Composition and process using ester solvents for fabricating metal oxide films and electronic devices including the same
摘要 A metal organic liquid precursor solution includes metal organic complexes dispersed in an ester solvent. The ester solvent has medium length carbon chains to prevent the precipitation of strongly electropositive metals in solution. A liquid precursor solution is used to make thin film metal oxides of uniform thickness and consistent quality.
申请公布号 US5788757(A) 申请公布日期 1998.08.04
申请号 US19960770991 申请日期 1996.12.23
申请人 SYMETRIX CORPORATION;MITSUBISHI MATERIALS CORPORATION 发明人 UCHIDA, HIROTO;SOYAMA, NOBUYUKI;KAGEYAMA, KENSUKE;OGI, KATSUMI;BACON, JEFFREY W.;SCOTT, MICHAEL C.;MCMILLAN, LARRY D.;PAZ DE ARAUJO, CARLOS A.
分类号 C01B13/32;C01G33/00;C01G35/00;C23C18/12;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):C07F19/00;C07F3/00;C07F9/00;C07F9/94 主分类号 C01B13/32
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